To improve the accuracy of three-dimensional (3D) surface contour measurements of freeform optics, a two-dimensional (2D) tilt measurement sensor for confocal microscopy (CM) systems is proposed based on a double-cylindrical mirror structure. First, the proposed system is accurately modeled. Second, we introduce a modified mean-shift-based peak-extraction algorithm with a novel kernel function (MSN) because the reflectivity of the measured object and fluctuation of the light source affect the measurement accuracy. Third, a partition fitting (PF) strategy is proposed to reduce the fitting error and improve the measurement accuracy. Simulations and experiments reveal that the robustness, speed, and angular prediction accuracy of the system effectively improved as a function of MSN and PF. The developed sensor can measure the 2D tilt, where each tilt is a composition of two separate dimensions, and the mean prediction errors in the 2D plane from -10°-+10° are 0.0134° (0.067% full scale (F.S)) and 0.0142° (0.071% F.S). The sensor enables the optical probe of a traditional CM to obtain accurate and simultaneous estimates of the 2D inclination angle and spatial position coordinates of the measured surface. The proposed sensor has potential in 3D topographic reconstruction and dynamic sampling rate optimization for 3D contour detection.

Download full-text PDF

Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9501962PMC
http://dx.doi.org/10.3390/s22186794DOI Listing

Publication Analysis

Top Keywords

two-dimensional tilt
8
tilt measurement
8
measurement sensor
8
double-cylindrical mirror
8
mirror structure
8
confocal microscopy
8
function msn
8
measurement accuracy
8
sensor
5
precise two-dimensional
4

Similar Publications

Want AI Summaries of new PubMed Abstracts delivered to your In-box?

Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!