Developments of Interfacial Measurement Using Cavity Scanning Microwave Microscopy.

Scanning

Key Laboratory of Instrument Science and Dynamic Testing Ministry of Education, North University of China, Taiyuan 030051, China.

Published: August 2022

In the field of materials research, scanning microwave microscopy imaging has already become a vital research tool due to its high sensitivity and nondestructive testing of samples. In this article, we review the main theoretical and fundamental components of microwave imaging, in addition to the wide range of applications of microwave imaging. Rather than the indirect determination of material properties by measuring dielectric constants and conductivity, microwave microscopy now permits the direct investigation of semiconductor devices, electromagnetic fields, and ferroelectric domains. This paper reviews recent advances in scanning microwave microscopy in the areas of resolution and operating frequency and presents a discussion of possible future industrial and academic applications.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9391160PMC
http://dx.doi.org/10.1155/2022/1306000DOI Listing

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