In this paper, a new analytical method to achieve the maximum signal-to-noise ratio () of a micro search coil magnetometer (µSCM) is presented. A planar spiral inductor was utilized to miniaturize conventional bulky search coil magnetometers. First, dimensional analysis was applied to identify three dimensionless parameters for the µSCM's key performance indices (sensitivity (), noise, and ). The effect of the parameters on the µSCM's performance was carefully investigated, and a novel 4D nomogram was developed. Furthermore, an analysis considering noise sources of a low-noise amplifier was performed. By combining the results from the nomogram and the effect of the noise sources from the amplifier circuit, optimum values for the dimensionless parameters were calculated. According to the calculation results, the dominant noise source varied with an increase in the track width ratio to the outer diameter. Seven different samples were fabricated by a single-mask lithography process. The sensitivity of 1612 mV/mT was demonstrated at a 50 Hz input magnetic field, which was better than the previous µSCM ( = 6.5 mV/mT) by more than 2 orders of magnitude. Finally, one of the fabricated µSCMs was employed to measure the online power consumption of a personal computer while different types of software were running.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9413634PMC
http://dx.doi.org/10.3390/mi13081342DOI Listing

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