AI Article Synopsis
- Multi-component nitride thin films, like (AlTiVCr)N, demonstrate high hardness and wear resistance due to their nanoscale structure and solid-solution strengthening.
- These films have impressive mechanical properties, achieving a strength of ~4.5 GPa and a fracture strain of ~5.0%, thanks to the combination of nanocrystalline structure, covalent bonding, and interstitial strengthening.
- Understanding the impact of nitrogen atoms on these films' mechanical performance can enhance their application in micro- and nano-devices.
Article Abstract
Multi-component nitride thin films usually show high hardness and good wear resistance due to the nanoscale structure and solid-solution strengthening effect. However, the state of N atoms in the thin film and its effects on the compressive strength is still unclear. In this work, (AlTiVCr)N multi-component nitride thin films with a face-centered cubic (FCC) structure prepared by the direct current magnetron sputtering method exhibit a superior strength of ~4.5 GPa and final fracture at a strain of ~5.0%. The excellent mechanical properties are attributed to the synergistic effects of the nanocrystalline structure, covalent bonding between N and metal atoms, and interstitial strengthening. Our results could provide an intensive understanding of the relationship between microstructure and mechanical performances for multi-component nitride thin films, which may promote their applications in micro- and nano-devices.
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Source |
|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9370140 | PMC |
| http://dx.doi.org/10.3390/nano12152722 | DOI Listing |
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