In this paper, a pressure sensor based on a metal diaphragm and lever structure is designed, the sensing principle and mechanical structure of this sensor are analyzed and simulated, and its sensitization effectiveness and temperature compensation are verified. The maximum deflections of metal diaphragms of different sizes and materials were compared, and it was found that the square beryllium bronze diaphragm with a thickness of 1 mm and a side length of 20 mm had good elastic properties. The influence of the FBG in different positions of the lever on the center wavelength is analyzed. The sensitivity of the bare FBG is markedly improved under the influence of the two structures of the square elastic diaphragm and the lever, with a typical pressure sensitivity of 3.35 nm/MPa at 3 mm to the left of the lever center. The purpose of temperature compensation is achieved by adding another FBG that measures the temperature, and the sensing sensitivity can be tuned by adjusting the position of the FBG. It can meet the detection needs of a small range and high sensitivity.
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| http://dx.doi.org/10.3390/s22145096 | DOI Listing |
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