Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers.

The mechanical and wear behavior of CrN/CrAlN multilayers were improved by tailoring the experimental conditions of a hybrid magnetron sputtering process based on a high-power impulse (HiPIMS) and two direct current magnetron sputtering (dcMS) power supplies. To this end, the influence of the base layer and of the combination of Cr and CrAl targets, which were switched to the dcMS and HiPIMS power supplies in different configurations, were investigated with respect to the growth of ceramic CrN/CrAlN multilayers onto commercial gas-nitrided diesel piston rings. The microstructure, grain morphology, and mechanical properties were evaluated by field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and instrumented nanoindentation. Bench wear tests simulating the operation of a combustion engine were conducted against a gray cast iron cylinder liner under reciprocating conditions using 0W20 oil as a lubricating agent enriched with AlO particles. The results revealed a significant increase in hardness, resistance to plastic strain, and wear resistance when two CrAl targets were switched to a HiPIMS and a dcMS power supply, and a Cr target was powered by another dcMS power supply. The compressive coating stresses were slightly reduced due to the soft Cr base layer that enabled stress relief within the multilayer. The proposed concept of hybrid magnetron sputtering outperformed the commercial PVD coatings of CrN for diesel piston rings manufactured by cathodic arc evaporation.