Diffraction Efficiency of MEMS Phase Light Modulator, TI-PLM, for Quasi-Continuous and Multi-Point Beam Steering.

The recent development of the Micro Electromechanical System (MEMS) Phase Light Modulator (PLM) enables fast laser beam steering for lidar applications by displaying a Computer-Generated Hologram (CGH) without employing an iterative CGH calculation algorithm. We discuss the application of MEMS PLM (Texas Instruments PLM) for quasi-continuous laser beam steering by deterministically calculated CGHs. The effect on the diffraction efficiency of PLM non-equally spaced phase levels was quantified. We also address the CGH calculation algorithm and an experimental demonstration that steered and scanned the beam into multiple regions of interest points, enabling beam steering for lidar without sequential raster scanning.