In this review we present some of the recent advances in the field of silicon nitride photonic integrated circuits. The review focuses on the material deposition techniques currently available, illustrating the capabilities of each technique. The review then expands on the functionalisation of the platform to achieve nonlinear processing, optical modulation, nonvolatile optical memories and integration with III-V materials to obtain lasing or gain capabilities.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9185365 | PMC |
| http://dx.doi.org/10.3390/s22114227 | DOI Listing |
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