Patterning high-resolution microstructures on thermoplastic substrates is of fundamental importance for the commercialization of microfluidics, advanced functional surfaces, and optical elements. Though many methods are developed to fabricate micropatterned plastic devices with 100 μm resolution, they suffer substantially higher cost or lower productivity when the resolution of the micropatterns is to be further improved. Here, we develop low-cost molds consisting of thin ceramic-filled-epoxy composite coatings on steel substrates. By virtue of the loaded ZrO nanoparticle fillers, the enhanced mechanical and thermal properties of the composite molds enable the epoxy microstructures to survive harsh conditions in conventional thermoplastic processing methods including hot embossing, imprinting, and mold injection. With the ceramic-filled-epoxy coated molds, we are able to improve the fabrication resolution of microstructures on plastics to 10 μm with unprecedented low-cost and excellent durability.
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| http://dx.doi.org/10.1021/acsami.2c04277 | DOI Listing |
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