Electron ptychography dose reduction using Moiré sampling on periodic structures.

Ultramicroscopy

Department of Materials Science and Engineering, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada; Canadian Light Source, 44 Innovation Boulevard, Saskatoon, SK S7N 2V3 Canada. Electronic address:

Published: September 2022

Electron ptychography has been implemented in Scanning Transmission Electron Microscopy (STEM) to study materials with higher spatial resolution. High electron dose imposed by data redundancy requirement in electron ptychography is detrimental to the samples well-suited for ptychography, i.e., thin samples. In this work, we demonstrate a smart (Moiré) sampling strategy which allows dose reduction by orders of magnitude on periodic crystalline samples.

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http://dx.doi.org/10.1016/j.ultramic.2022.113559DOI Listing

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