Spectroscopic Ellipsometry Study on Tuning the Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition.

ACS Appl Electron Mater

Departamento de Física de la Materia Condensada, Universidad de Cádiz, Campus de Puerto Real, E11519 Puerto Real, Spain.

Published: March 2022