AI Article Synopsis

  • The study analyzes high-frequency vibrations in piezoelectric bulk acoustic wave sensors made from crystals with a 3m symmetry group, using Mindlin's first-order plate theory to establish spectral-frequency relationships and optimal length-thickness ratios.
  • It examines dynamic capacitance through forced vibration analysis and identifies resonance modes for effective energy trapping, while also calculating frequency interferences between resonator units and their dependency on spacing and electrode width.
  • The findings reveal that increasing electrode spacing reduces safe distances between resonator units and that equal spacing yields the largest safe distance, with theoretical results supported by finite element methods for design optimization of piezoelectric sensors.

Article Abstract

Based on Mindlin's first-order plate theory, the high-frequency vibrations of piezoelectric bulk acoustic wave array sensors under lateral-field-excitation based on crystals with 3 m point group are analyzed, and the spectral-frequency relationships are solved, based on which, the optimal length-thickness ratio of the piezoelectric crystal plate is determined. Then, the dynamic capacitance diagram is obtained by a forced vibration analysis of the piezoelectric crystal plate. The resonant mode conforming to good energy trapping is further obtained. The frequency interferences between different resonator units are calculated, and the influences of the spacing between two resonant units on the frequency interference with different electrode widths and spacings are analyzed. Finally, the safe spacings between resonator units are obtained. As the electrode spacing value of the left unit increases, the safe spacing between the two resonator units decreases, and the frequency interference curve tends to zero faster. When the electrode spacings of two resonator units are equal, the safe distance is largest, and the frequency interference curve tends to zero slowest. The theoretical results are verified further by finite element method. The analysis model of high frequency vibrations of strongly coupled piezoelectric bulk acoustic array device based on LiTaO crystals with 3 m point group proposed in this paper can provide reliable theoretical guidance for size optimization designs of strongly coupled piezoelectric array sensors under lateral-field-excitation.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9099703PMC
http://dx.doi.org/10.3390/s22093596DOI Listing

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