AI Article Synopsis

  • Continuous advancements in electronic devices beyond traditional silicon require the integration of ferroelectric and semiconductor materials, particularly hafnium oxide (HfO).
  • Recent research shows that local helium (He) implantation can activate ferroelectric properties in HfO, although the mechanisms behind this process are still not fully understood.
  • The study explores various factors like molar volume changes and vacancy dynamics caused by He ion implantation, which provides insights into the origins of ferroelectricity and potential for developing new nanoengineered materials.

Article Abstract

Continuous advancement in nonvolatile and morphotropic beyond-Moore electronic devices requires integration of ferroelectric and semiconductor materials. The emergence of hafnium oxide (HfO)-based ferroelectrics that are compatible with atomic-layer deposition has opened interesting and promising avenues of research. However, the origins of ferroelectricity and pathways to controlling it in HfO are still mysterious. We demonstrate that local helium (He) implantation can activate ferroelectricity in these materials. The possible competing mechanisms, including He ion-induced molar volume changes, vacancy redistribution, vacancy generation, and activation of vacancy mobility, are analyzed. These findings both reveal the origins of ferroelectricity in this system and open pathways for nanoengineered binary ferroelectrics.

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http://dx.doi.org/10.1126/science.abk3195DOI Listing

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