The amorphous indium gallium oxide thin film transistor was fabricated using a cosputtering method. Two samples with different gate dielectric layers were used as follows: sample A with a SiO dielectric layer; and sample B with an AlO dielectric layer. The influence of the gate dielectrics on the electric and photo performance has been investigated. Atomic layer deposition deposited the dense film with low interface trapping density and effectively increased drain current. Therefore, sample B exhibited optimal parameters, with an / ratio of 7.39 × 10, the subthreshold swing of 0.096 V dec, and of 5.36 cm V s. For ultraviolet (UV) detection, the UV-to-visible rejection ratio of the device was 3 × 10, and the photoresponsivity was 0.38 A W at the of -5 V.

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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9050226PMC
http://dx.doi.org/10.1039/d0ra00123fDOI Listing

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