Ultra-fast thermal annealing of semiconductor materials using a laser can be revolutionary for short processing times and low manufacturing costs. Here we investigate Cu-In-Se thin films as precursors for CuInSe semiconductor absorber layers laser annealing. The reaction mechanism of laser annealed metal stacks is revealed by measuring X-ray diffractograms, Raman spectra and composition. It is shown that the formation of CuInSe occurs the formation of Cu Se/In Se binary phases as in conventional annealing routes, despite the entirely different annealing time scale. Pre-alloying the Cu and In metals prior to laser annealing significantly enhances the selenisation reaction rate. Laser annealing for six seconds approaches a near phase-pure material, which exhibits similar crystalline quality to the reference material annealed for ninety minutes in a tube furnace. The estimated quasi Fermi level splitting deficit for the laser annealed material is only 60 meV lower than the reference sample, which implies a high optoelectronic quality.
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http://www.ncbi.nlm.nih.gov/pmc/articles/PMC9047539 | PMC |
http://dx.doi.org/10.1039/c9ra06896a | DOI Listing |
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