In this study, interlayer directional coupling (DC) thermo-optic (TO) waveguide switches were designed and fabricated using functionalized epoxy-crosslinking polymers. Fluorinated SU-8 (FSU-8) with a photo-initiating epoxy-crosslinking network was self-synthesized as a waveguide core material. A copolymer of methyl methacrylate and glycidyl methacrylate P(MMA-co-GMA) with a thermo-initiating epoxy crosslinking structure was self-synthesized as a waveguide cladding material. Compared with commercial pure SU-8 and PMMA, FSU-8 exhibited a lower absorption loss and P(MMA-co-GMA) exhibited a higher thermal stability. Using epoxy-crosslinking functionalized polymers, the structure of the waveguides and electrode heaters were optimized, and the performance parameters of the interlayer DC TO switches were simulated. At a signal wavelength of 1550 nm, the insertion loss, extinction ratio, and power consumption of the actual interlayer devices were measured as 6.7 dB, 15.6 dB, and 9 mW, respectively. The rising and falling response times of the TO switches were obtained as 631.6 µs and 362 µs, respectively. The self-leveling ability and solvent resistance characteristic of the epoxy-crosslinking network for FSU-8 and P(MMA-co-GMA) may guarantee the realization of interlayer DC TO waveguide switches. The proposed technique will be suitable for photonic integrated waveguide chips with multilayer stacking dynamic optical information interactions.

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http://dx.doi.org/10.1364/OE.451063DOI Listing

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