A compact damping ring with a limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the storage ring is modulated by a 257 nm wavelength seed laser with the help of the angular-dispersion-induced micro-bunching method (Feng and Zhao in Sci Rep 7:4724, 2017), coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC8885752 | PMC |
| http://dx.doi.org/10.1038/s41598-022-07323-z | DOI Listing |
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A synchrotron-based kilowatt-level radiation source for EUV lithography.
Sci Rep
February 2022
Institute of High Energy Physics, Chinese Academy of Sciences, Beijing, 100049, China.
A compact damping ring with a limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the storage ring is modulated by a 257 nm wavelength seed laser with the help of the angular-dispersion-induced micro-bunching method (Feng and Zhao in Sci Rep 7:4724, 2017), coherent radiation at 13.5 nm with an average power of about 2.
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