AI Article Synopsis
- Extreme ultraviolet microscopy and wavefront sensing are crucial for advancing ultrafast applications in imaging and diagnostics, particularly at 13.5 nm wavelengths.
- Ptychography presents a strong solution to challenges in these fields, having been successfully transferred from electron and synchrotron environments to laboratory settings due to improvements in high-harmonic tabletop sources.
- This review discusses the latest developments in tabletop ptychography, covering hardware options, data analysis algorithms, and various technological applications like wavefront sensing and attosecond pulse characterization.
Article Abstract
Extreme ultraviolet microscopy and wavefront sensing are key elements for next-generation ultrafast applications, such as chemically-resolved imaging, focal spot diagnostics in pump-and-probe experiments, and actinic metrology for the state-of-the-art lithography node at 13.5 nm wavelength. Ptychography offers a robust solution to the aforementioned challenges. Originally adapted by the electron and synchrotron communities, advances in the stability and brightness of high-harmonic tabletop sources have enabled the transfer of ptychography to the laboratory. This review covers the state of the art in tabletop ptychography with high harmonic generation sources. We consider hardware options such as illumination optics and detector concepts as well as algorithmic aspects in the analysis of multispectral ptychography data. Finally, we review technological application cases such as multispectral wavefront sensing, attosecond pulse characterization, and depth-resolved imaging.
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| http://dx.doi.org/10.1364/OE.443622 | DOI Listing |
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