Metamaterials have shown great potential for modulation on the amplitude, phase and polarization of the terahertz wave. Here vacancies were introduced into the metamaterial arrays to tune the mutual interaction between the constituent resonators, which could heavily affect the electromagnetic response of the whole metamaterial arrays. We show that the introduced vacancies in the metamaterial arrays can effectively affect the resonance mode of the metamaterial arrays. Based upon the vacancy mediated coupling, a silicon-metal hybrid metamaterial arrays were designed to achieve active modulation of propagating terahertz waves.
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