A robust fabrication method for stable mesoporous silicon membranes using standard microfabrication techniques is presented. The porous silicon membranes were passivated through the atomic layer deposition of different metal oxides, namely aluminium oxide AlO, hafnium oxide HfO and titanium oxide TiO. The fabricated membranes were characterized in terms of morphology, optical properties and chemical properties. Stability tests and optical probing noise level determination were also performed. Preliminary results using an AlO passivated membranes for a biosensing application are also presented for selective optical detection of bacterial lysate. The biosensor was able to detect the bacterial lysate, with an initial bacteria concentration of 10 colony forming units per mL (CFU/mL), in less than 10 min.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779296 | PMC |
| http://dx.doi.org/10.3390/mi13010010 | DOI Listing |
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