AI Article Synopsis

  • A new method for creating high-performing hydrogen sensors was developed, utilizing a chromium oxidation process to create a nanogap in suspended palladium and gold films.
  • The sensor operates on the principle that palladium expands when it comes into contact with hydrogen, allowing it to detect gas by closing the nanogap and measuring current.
  • The enhanced sensor demonstrated excellent sensitivity and quick response time, while being cost-effective and suitable for large-scale manufacturing.

Article Abstract

Developing high response hydrogen sensors manufacturable in a large scale is desirable in hydrogen industry. In this study, a chromium oxidation-based nanogap formation process was developed to fabricate a hydrogen switch with suspended palladium and gold films having a tens of nanometer-sized gap. The nanogap was formed by using oxidized chromium as a self-alignment shadow mask. The hydrogen switch operates by the principle of volume expansion of palladium upon exposure to the hydrogen gas and the current reading by closing of a nanogap formed between suspended palladium and gold films. Further improvement of the sensor performance was achieved by optimizing the design parameters such as suspended film lengths and thicknesses. The fabricated palladium nanogap hydrogen sensor showed an ultrahigh sensitivity of Δ/ > 10 with a fast response time (22 s) to 4% hydrogen. The complementary metal-oxide-semiconductor-compatible fabrication of the hydrogen switch is easily scalable with low manufacturing cost.

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http://dx.doi.org/10.1021/acs.langmuir.1c02643DOI Listing

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