Fabrication of Suspended PMMA-Graphene Membrane for High Sensitivity LC-MEMS Pressure Sensor.

The LC-MEMS pressure sensor is an attractive option for an implantable sensor. It senses pressure wirelessly through an LC resonator, eliminating the requirement for electrical wiring or a battery system. However, the sensitivity of LC-MEMS pressure sensors is still comparatively low, especially in biomedical applications, which require a highly-sensitive sensor to measure low-pressure variations. This study presents the microfabrication of an LC wireless MEMS pressure sensor that utilizes a PMMA-Graphene (PMMA/Gr) membrane supported on a silicon trench as the deformable structure. The (PMMA/Gr) membrane was employed to increase the sensor's sensitivity due to its very low elastic modulus making it easy to deform under extremely low pressure. The overall size of the fabricated sensor was limited to 8 mm × 8 mm. The experimental results showed that the capacitance value changed from 1.64 pF to 12.32 pF when the applied pressure varied from 0 to 5 psi. This capacitance variation caused the frequency response to change from 28.74 MHz to 78.76 MHz. The sensor sensitivity was recorded with a value of 193.45 kHz/mmHg and a quality factor of 21. This study concludes that the (PMMA/Gr) membrane-based LC-MEMS pressure sensor has been successfully designed and fabricated and shows good potential in biomedical sensor applications.