A CuO film is prepared on a flexible polyethylene terephthalate substrate for a bending sensor using the spin-spray method, a facile and low-environmental-load solution process. The CuO bending sensor shows high sensitivity and high resolution not only over a wide range of curvatures (0 < κ < 0.21 mm) but also for very small curvature changes (Δκ = ∼ 0.03 mm). The bending response of the sensor exhibited a curvature change of high linearity with a good gauge factor (18.2) owing to the grain-boundary resistance and piezoresistive effects of the fabricated CuO film. In addition, the sensor possesses good repeatability, stability, and long-term (>30 days) and mechanical fatigue durability (1000 bending-release cycles). The sensor is capable of detailed monitoring of large- and small-scale human motions, such as finger bending, wrist bending, nodding, mouth opening/closing, and swallowing. In addition, excellent stability and repeatability of the monitoring performance is observed over a wide range of motion angles and speeds. All of these results demonstrate the potential of the flexible bending sensor based on the CuO film as a candidate for healthcare monitoring and wearable electronics.
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| http://dx.doi.org/10.1021/acsomega.1c04279 | DOI Listing |
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