Measurement uncertainty evaluation procedures and applications for various types of multichannel rotating-element spectroscopic ellipsometers.

A universal measurement uncertainty evaluation procedure is required for different types of multichannel rotating-element spectroscopic ellipsometers (RE-SEs) used in modern semiconductor industry. Herein, an improved uncertainty evaluation procedure, based on the universal measurement model functions and implicit function theorem, is introduced for unknown optical parameters of a sample. In addition, we develop a measurement standard instrument that can solve the error problems related to the basic principles of the multichannel RE-SEs used in the industrial field and present an example of applying the proposed uncertainty evaluation method to this standard instrument. Accordingly, the measurement performance for several types of real-time RE-SEs can be quantitatively compared. It can also be used for standardization, instrumentation, and measurement optimization.