We propose analysis methods for mirror bonding. The functional relationship between the shrinkage of the adhesive layer and the shape accuracy of the mirror is established numerically. By designing the structural form of the optical mounting and setting an appropriate stiffness ratio between the mirror and bonding position of the optical mounting, the theoretical surface shape accuracy change can be determined. Accordingly, the mirror is bonded, and the surface shape accuracy of the mirror after bonding is found to be 0.020λ. This approach is useful in mirror design applications that require rapid preparation and accuracy control.
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| http://dx.doi.org/10.1364/OE.435527 | DOI Listing |
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