Rigorous coupled-wave analysis of a multi-layered plasmonic integrated refractive index sensor.

We apply the rigorous coupled-wave analysis (RCWA) to the design of a multi-layer plasmonic refractive index sensor based on metallic nanohole arrays integrated with a Ge-on-Si photodetector. RCWA simulations benefit from modularity, frequency-domain computation, and a relatively simple computational setup. These features make the application of RCWA particularly interesting in the case of the simulation and optimization of multi-layered devices in conjunction with plasmonic nanostructures, where other methods can be computationally too expensive for multi-parameter optimization. Our application example serves as a demonstration that RCWA can be utilized as a low-cost, efficient method for device engineering.