To analyze the distortion problem of two-dimensional micro-electromechanical system (MEMS) micromirror in-plane scanning, this paper makes a full theoretical analysis of the distortion causes from many aspects. Firstly, the mathematical relations among the deflection angle, laser incidence angle, and plane scanning distance of the micromirror are constructed, and the types of projection distortion of the micromirror scanning are discussed. Then the simulation results of reflection angle distribution and point cloud distribution are verified by MATLAB software under different working conditions. Finally, a two-dimensional MEMS micromirror scanning projection system is built. The predetermined waveform can be scanned and projected successfully. The distortion theory is proved to be correct by analyzing the distortion of the projection images, which lays a foundation for practical engineering application.
Download full-text PDF |
Source |
|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC8306571 | PMC |
| http://dx.doi.org/10.3390/mi12070818 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
Optomagnetic Micromirror Arrays for Mapping Large Area Stiffness Distributions of Biomimetic Materials.
Small
November 2024
Department of Mechanical and Aerospace Engineering, University of California Los Angeles, Los Angeles, CA, 90095, USA.
A new device termed "Optomagnetic Micromirror Arrays" (OMA) is demonstrated capable of mapping the stiffness distribution of biomimetic materials across a 5.1 mm × 7.2 mm field of view with cellular resolution.
View Article and Find Full Text PDFAn optomechanical MEMS geophone with a 2.5 ng/Hz noise floor for oil/gas exploration.
Microsyst Nanoeng
November 2024
PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China.
High-precision geophones play crucial roles in terrestrial applications such as oil and gas exploration as well as seismic monitoring. The development of optomechanical precision measurements provides a new design method for geophones, offering higher sensitivity and smaller dimensions compared to traditional geophones. In this work, we introduce an optomechanical microelectromechanical system (MEMS) geophone based on a plano-concave Fabry‒Perot (F-P) microcavity, which has a high sensitivity of 146 V/g.
View Article and Find Full Text PDFMEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects.
Micromachines (Basel)
September 2024
CenBRAIN Neurotech, School of Engineering, Westlake University, Hangzhou 310030, China.
Micromirrors have recently emerged as an essential component in optical scanning technology, attracting considerable attention from researchers. Their compact size and versatile capabilities, such as light steering, modulation, and switching, are leading them as potential alternatives to traditional bulky galvanometer scanners. The actuation of these mirrors is critical in determining their performance, as it contributes to factors such as response time, scanning angle, and power consumption.
View Article and Find Full Text PDFA Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors.
Micromachines (Basel)
August 2024
School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.
This paper presents the design, simulation, fabrication, and characterization of a novel large-scan-range electrothermal micromirror integrated with a pair of position sensors. Note that the micromirror and the sensors can be manufactured within a single MEMS process flow. Thanks to the precise control of the fabrication of the grid-based large-size Al/SiO bimorph actuators, the maximum piston displacement and optical scan angle of the micromirror reach 370 μm and 36° at only 6 Vdc, respectively.
View Article and Find Full Text PDFA new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors.
Microsyst Nanoeng
May 2024
Ningbo Institute of Northwestern Polytechnical University, College of Mechanical Engineering, Northwestern Polytechnical University, 710072 Xi'an, China.
As one of the most common spatial light modulators, linear micromirror arrays (MMAs) based on microelectromechanical system (MEMS) processes are currently utilized in many fields. However, two crucial challenges exist in the fabrication of such devices: the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual stress. To solve these issues, an innovative processing method assisted by temporary anchors is presented.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!