Cantilever-based differential pressure sensor with a bio-inspired bristled configuration.

Inspired by the bristled wing configuration of tiny insects, we proposed a novel polyimide (PI) cantilever-based differential pressure (DP) sensor. This bristled PI cantilever with a thin metallic piezoresistor was designed to detect the pressure difference that induced the aerodynamic loading on the surface of the cantilever. Owing to the aerodynamic characteristics of the bristled cantilever, the DP-sensor with the bristled cantilever could not only retain a comparable sensitivity with that of the paddle cantilever under low differential pressures but also achieve a higher theoretical upper detection limit due to the enhanced leakage of the bristles. Experimental results indicated that the DP-sensor with bristled cantilevers extended the detection range by ∼30% in comparison with the DP-sensor with paddle cantilevers. The high sensitivity, wide detection range, and facile fabrication process of these bio-inspired DP-sensors make them promising for future applications.