Using stacked samples of Al foil and H-containing resin film, we have carried out elastic recoil detection analysis with transmission layout (T-ERDA) to investigate the depth resolution in the measurements of H distribution in Al. For narrow and wide acceptance conditions of the detector, the depth resolutions of 1.5-4.9m at several depths in Al of 50 and 80m thicknesses have been determined for incidence of 8 MeVHe. While the main factor to degrade the depth resolution is the energy straggling of recoil H for narrow acceptance conditions, it is the extended low-energy side of the H spectrum for wide acceptance conditions. The knowledge obtained in this work is useful for analysis of 3D images of H distribution measured by T-ERDA, for example, future analysis of minerals or natural glass samples to determine abundances and distributions of water or OH in the samples.
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