Extraction of acceptor concentration map from EBIC experiments.

Controlling two dimensional doping distributions is an important benefit in order to check processed substrates or specific devices. To achieve this purpose, a new methodology is proposed in order to obtain qualitative maps of acceptor concentration from one EBIC image. Analytical models are used to help in defining the best experimental condition and to check the validity of the approach, and a TCAD simulation is performed on a realistic structure and shows promising results. Then, a measurement is carried out on a device and the epitaxy gradient is clearly visible, as well as the presence of Pwell layers.