In this work, a new flexible and biocompatible microfluidic pH sensor based on surface acoustic waves (SAWs) is presented. The device consists of polyethylene naphthalate (PEN) as a flexible substrate on which aluminum nitride (AlN) has been deposited as a piezoelectric material. The fabrication of suitable interdigitated transducers (IDTs) generates Lamb waves (L-SAW) with a center frequency ≈500 MHz traveling in the active region. A SU-8 microfluidics employing ZnO nanoparticles (NPs) functionalization as a pH-sensitive layer is fabricated between the IDTs, causing a shift in the L-SAW resonance frequency as a function of the change in pH values. The obtained sensitivity of ≈30 kHz/pH from pH 7 to pH 2 demonstrates the high potential of flexible SAW devices to be used in the measurement of pH in fluids and biosensing.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC8229701 | PMC |
| http://dx.doi.org/10.3390/nano11061479 | DOI Listing |
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