Epitaxial lift-off of freestanding (011) and (111) SrRuO thin films using a water sacrificial layer.

Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO thin films using SrAlO water-sacrificial layer. The epitaxial SrAlO(011) and SrAlO(111) layers were realized on SrTiO(011) and SrTiO(111), respectively. Subsequently, SrRuO films were epitaxially grown on these sacrificial layers. The freestanding single crystalline SrRuO(011) and SrRuO(111) films were successfully transferred on Si substrates, demonstrating possibilities to transfer desirable oriented oxide perovskite films on Si and arbitrary substrates.