Linearly-polarized pulsed Nd-doped fiber MOPA at 905 nm and frequency conversion to deep-UV at 226 nm.

We present the first frequency-quadrupled linearly-polarized Q-switched neodymium-doped fiber laser generating > 500 mW average power at 226 nm. For this purpose, an amplified Q-switched oscillator using novel large-mode-area (LMA) fibers and generating up to 24 W average power (15 kW peak power) at 905 nm was developed. Two nonlinear frequency conversion stages using a LBO crystal for SHG and a BBO crystal for FHG generate respectively up to 4.9 W average power in the deep blue at 452 nm and a maximum of 510 mW average power in the deep ultra-violet (DUV) at 226 nm. Performance limitations and further improvements are discussed.