Microlens Array Fabrication by Using a Microshaper.

Micromachines (Basel)

Department of Mechanical and Computer-Aided Engineering, Feng Chia University, Taichung City 407, Taiwan.

Published: February 2021

A simple, easy, inexpensive, and quick nonsilicon-based micromachining method was developed to manufacture a microlens array. The spherical surface of the microlens was machined using a microshaper mounted on a three-axis vertical computer numerical control (CNC) machine with cutter-path-planning. The results show the machined profiles of microlens agree well with designed profiles. The focus ability of the machined microlens array was verified. The designed and measured focal lengths have average 1.5% error. The results revealed that the focal lengths of micro lens agreed with the designed values. A moderate roughness of microlens surface is obtained by simply polishing. The roughness of the lens surface is 43 nm in feed direction (x-direction) and 56 nm in path interval direction (y-direction). It shows the simple, scalable, and reproducible method to manufacture microlenses by microshaper with cutter-path-planning is feasible.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC7997474PMC
http://dx.doi.org/10.3390/mi12030244DOI Listing

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