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Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level. | LitMetric

AI Article Synopsis

  • The study explored the design of innovative aspheric and freeform optical elements to improve calibration and verification processes for ultra-high precision measurement systems.
  • It focused on analyzing form errors in optical surfaces using minimum zone fitting techniques and produced two materials engineered specifically for durability and accuracy.
  • The data yielded consistent results across different measurement machines, confirming the creation of a reliable and traceable metrology system for assessing aspherical and freeform optical surfaces.

Article Abstract

The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC7915810PMC
http://dx.doi.org/10.3390/s21041103DOI Listing

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