This paper details the development of a lab-made experimental setup for surface photovoltage spectroscopy (SPS) measurements using an open-source and Arduino microcontroller to control a monochromator and some off-the-shelf electronic components. The experimental setup is interfaced to a computer, where LabVIEW based software manages system control and data acquisition. We also report the design of a compact sample holder, simple and easy to manufacture and handle. Results of the application of SPS to the characterization of MoO thin films and semiconductor laser structures are presented to validate the performance of the setup, highlighting the effectiveness of SPS for the characterization of semiconductor materials and devices.
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