Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications.

Nanoscale

National Engineering Research Centre for High Efficiency Grinding, College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, P. R. China.

Published: January 2021

AI Article Synopsis

  • - The article highlights the increasing interest in nanofabrication technologies for creating 3D structures and devices, particularly focusing on focused ion beam (FIB) nanofabrication due to its wide application in nanotechnology.
  • - It provides a detailed summary of various aspects of FIB nanofabrication, including mechanisms, instruments, processes, and typical applications, aimed at those wanting to understand these manufacturing techniques better.
  • - The article also discusses the current challenges faced in FIB nanofabrication and outlines future development trends to guide practitioners and researchers in advancing this technology.

Article Abstract

The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing. Among the various fabrication techniques, focused ion beam (FIB) nanofabrication has been established as a well-suited and promising technique in nearly all fields of nanotechnology for the fabrication of 3D nanostructures and devices because of increasing demands from industry and research. In this article, a series of FIB nanofabrication factors related to the fabrication of 3D nanostructures and devices, including mechanisms, instruments, processes, and typical applications of FIB nanofabrication, are systematically summarized and analyzed in detail. Additionally, current challenges and future development trends of FIB nanofabrication in this field are also given. This work intends to provide guidance for practitioners, researchers, or engineers who wish to learn more about the FIB nanofabrication technology that is driving the revolution in 3D nanostructures and devices.

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Source
http://dx.doi.org/10.1039/d0nr07539fDOI Listing

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