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Effect of Sacrificial AlN (Aluminum Nitride) Layer on the Deep Surface States of 4H-SiC. | LitMetric
We investigated the effect of a sacrificial AlN layer on the deep energy level states of 4H-SiC surface. The samples with and without AlN layer have been annealed at 1300 °C for 30 minutes duration using a tube furnace. After annealing the samples, the changes of the carbon vacancy () related defect characteristics were analyzed by deep level transient spectroscopy. The trap energy associated with double negative acceptor ((2-/0)) appears at ˜0.7 eV and was reduced from ˜0.687 to ˜0.582 eV in the sacrificial AlN layer samples. In addition, the capture cross section was significantly improved from ˜2.1×10-14 to ˜3.8×10 cm and the trap concentration was reduced by approximately 40 times.
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