We demonstrate the thermo-optic properties of silicon-rich silicon nitride (SRN) films deposited using plasma-enhanced chemical vapor deposition (PECVD). Shifts in the spectral response of Mach-Zehnder interferometers (MZIs) as a function of temperature were used to characterize the thermo-optic coefficients of silicon nitride films with varying silicon contents. A clear relation is demonstrated between the silicon content and the exhibited thermo-optic coefficient in silicon nitride films, with the highest achievable coefficient being as high as (1.65±0.08) ×10 K. Furthermore, we realize an SRN multi-mode interferometer (MMI) based thermo-optic switch with over 20 dB extinction ratio and total power consumption for two-port switching of 50 mW.
Download full-text PDF |
Source |
|---|---|
| http://dx.doi.org/10.1364/OE.396969 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
In Situ Transmission Electron Microscopy of Electrocatalyst Materials: Proposed Workflows, Technical Advances, Challenges, and Lessons Learned.
Small Methods
December 2024
Department of Chemical Engineering, McMaster University, Hamilton, ON, L8S 4L7, Canada.
In situ electrochemical liquid phase transmission electron microscopy (LP-TEM) measurements utilize micro-chip three-electrode cells with electron transparent silicon nitride windows that confine the liquid electrolyte. By imaging electrocatalysts deposited on micro-patterned electrodes, LP-TEM provides insight into morphological, phase structure, and compositional changes within electrocatalyst materials under electrochemical reaction conditions, which have practical implications on activity, selectivity, and durability. Despite LP-TEM capabilities becoming more accessible, in situ measurements under electrochemical reaction conditions remain non-trivial, with challenges including electron beam interactions with the electrolyte and electrode, the lack of well-defined experimental workflows, and difficulty interpreting particle behavior within a liquid.
View Article and Find Full Text PDFAzo-PMA nanopores of sub-20 nm length for unimolecular resolution of nucleic acids and proteins.
Talanta
December 2024
Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences & Chongqing School, University of Chinese Academy of Science, Chongqing, 400714, PR China. Electronic address:
Owing to the facile fabrication and surface modification, the cost-effective polymer nanopores are widely employed in unimolecular determination of biomacromolecules and selective sensing of small molecules, nanoparticles and biomarkers. However, the documented polymer nanochannels are generally microscale in length with low spatial resolution. We herein synthesized azobenzene side-chain polymer (Azo-PMA) and spin-coated on silicon nitride membrane to obtain a polymer film of nanoscale thickness for further nanopore generation via controlled dielectric breakdown (CDB) approach.
View Article and Find Full Text PDF3DCryoHolder: a new open access 3D printable system to store and transport silicon nitride membranes under cryogenic conditions for spectromicroscopy at low temperature.
J Synchrotron Radiat
January 2025
Polimero eta Material Aurreratuak: Fisika, Kimika eta Teknologia, Kimika Fakultatea, Euskal Herriko Unibertsitatea UPV/EHU, Donostia-San Sebastian 20018, Spain.
Data acquisition under cryogenic conditions allows one to avoid unwanted damage caused by beam irradiation. This is particularly important for the study of biological samples at hard X-ray, micro- or nano-probe beamlines, which focus synchrotron radiation to small beam sizes with extremely high flux densities. Sample preparation methods for cryopreserved specimens have been adapted from electron microscopy, and include the use of silicon nitride membranes as they are easy to handle and possess low X-ray absorption.
View Article and Find Full Text PDFDual-Wavelength On-Chip Integrated Metalens for Epi-Fluorescence Single-Molecule Sensing.
Sensors (Basel)
December 2024
Moscow Center for Advanced Studies, Kulakova str. 20, 123592 Moscow, Russia.
Single-molecule fluorescence spectroscopy offers unique capabilities for the low-concentration sensing and probing of molecular dynmics. However, employing such a methodology for versatile sensing and diagnostics under point-of-care demands device miniaturization to lab-on-a-chip size. In this study, we numerically design metalenses with high numerical aperture (NA = 1.
View Article and Find Full Text PDFAdvances, Challenges, and Applications of Graphene and Carbon Nanotube-Reinforced Engineering Ceramics.
Nanomaterials (Basel)
November 2024
Institute for Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Konkoly-Thege Miklós Str. 29-33, 1121 Budapest, Hungary.
Engineering ceramics and their composites are widely used owing to their excellent properties, including high wear, corrosion and heat resistance, low friction coefficient, and low thermal conductivity; thus, the current paper presents a comprehensive review of the most common types of engineering ceramics, demonstrating their key properties, advantages, potential applications, and challenges. This paper also provides prevailing methods for tackling the engineering ceramic challenges and maximizing their applicability. This review paper focuses on alumina (AlO), silicon carbide (SiC), zirconia (ZrO), aluminum nitride (AlN), and silicon nitride (SiN), and explores their usability in automotive, aerospace, and tribological applications.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!