We establish the ultimate limits that quantum theory imposes on the accuracy attainable in optical ellipsometry. We show that the standard quantum limit, as usually reached when the incident light is in a coherent state, can be surpassed with the use of appropriate squeezed states and, for tailored beams, even pushed to the ultimate Heisenberg limit.

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http://dx.doi.org/10.1364/OL.392955DOI Listing

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