Performance Comparison of SOI-Based Temperature Sensors for Room-Temperature Terahertz Antenna-Coupled Bolometers: MOSFET, PN Junction Diode and Resistor.

Assuming that the 0.6-μm silicon-on-insulator (SOI) complementary metal-oxide-semiconductor (CMOS) technology, different Si-based temperature sensors such as metal-oxide-semiconductor field-effect transistor (MOSFET) (n-channel and p-channel), pn-junction diode (with p-body doping and without doping), and resistors (n or p single crystalline Si and n polycrystalline Si) were designed and characterized for its possible use in 1-THz antenna-coupled bolometers. The use of a half-wave dipole antenna connected to the heater end was assumed, which limited the integrated temperature sensor/heater area to be 15 × 15 µm. Our main focus was to evaluate the performances of the temperature sensor/heater part, and the optical coupling between the incident light and heater via an antenna was not included in the evaluation. The electrothermal feedback (ETF) effect due to the bias current was considered in the performance estimation. A comparative analysis of various SOI bolometers revealed the largest responsivity () of 5.16 kV/W for the n-channel MOSFET bolometer although the negative ETF in MOSFET reduced the . The noise measurement of the n-channel MOSFET showed the NEP of 245 pW/Hz, which was more than one order of magnitude smaller than that of the n polycrystalline Si resistive bolometer (6.59 nW/Hz). The present result suggests that the n-channel MOSFET can be a promising detector for THz applications.