It is commonly known that the performance of an electrostatic microelectromechanical system (MEMS) device is limited to a specific range of the full gap distance due to the inherited "pull-in instability" phenomenon. In this work, we design a controller to extend the stabilization range of an electrostatic MEMS device and to enhance its performance. The interconnection and damping assignment-passivity based control (IDA-PBC) method is used and the controller design involves coordinate transformations and a coupling between the mechanical and electrical subsystems of the device. The method deploys a design of a speed observer to estimate the speed, which cannot be directly measured by sensors. The effectiveness of the dynamical controller is verified via numerical simulations; it is evident by the extended travel range of the parallel plates as well as the improved performance of the plates, even with a naturally lighter damping ratio.
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| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC7408588 | PMC |
| http://dx.doi.org/10.3390/mi11070688 | DOI Listing |
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