To fulfil the requirements for high-resolution organic light-emitting diode (OLED) displays, precise and high-quality micrometer-scale patterns have to be fabricated inside metal shadow masks. Invar has been selected for this application due to its unique properties, especially a low coefficient of thermal expansion. In this study, a novel cost-efficient method of multi-beam micromachining of invar will be introduced. The combination of a Meopta beam splitting, focusing and monitoring module with a galvanometer scanner and HiLASE high-energy pulse laser system emitting ultrashort pulses at 515 nm allows drilling and cutting of invar foil with 784 beams at once with high precision and almost no thermal effects and heat-affected zone, thus significantly improving the throughput and efficiency.
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http://dx.doi.org/10.3390/ma13132962 | DOI Listing |
Micromachines (Basel)
June 2022
Center for Micro and Nanoscale Research and Fabrication, Hefei National Laboratory for Physical Science at Microscale, University of Science and Technology of China, Hefei 230026, China.
With the development of virtual reality/augmented reality (VR/AR) display devices, the conventional fine metal mask is limited by the wet etch process, which no longer meets the demand for high pixels per inch (PPI) displays. We deposited a layer of magnetic metal on the silicon substrate by physical vapor deposition (PVD), and then developed a 2-inch, 3175 PPI magnetic metal hard mask on silicon substrate (MMS) through deep silicon etching and other micro-nano processing for patterning Organic Light-Emitting Diodes (OLED) displays, which can achieve smaller pixel size and higher PPI. MMS can not only solve the bottleneck problem of the traditional invar alloy shadow mask with low PPI, but also reduce the bending caused by the deformation of the silicon-based mask due to gravity, so that it achieves high PPI and higher uniformity in OLED displays.
View Article and Find Full Text PDFMicromachines (Basel)
December 2021
Key Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, China.
The optical acoustic detection system based on the Fabry Pérot Etalon (FPE) with high quality-factor (High Q) and stability structure is described and tested. The FPE contains two high-reflectivity Plano-Concave lenses, achieving high fineness and stability. The protective structure of the confocal stabilized FPE is composed of an invar tube, copper sheath, Bakelite sheath and aluminum housing to protect the sensor from the effects of ambient temperature and vibration.
View Article and Find Full Text PDFMicromachines (Basel)
July 2020
Laser Research Center, Faculty of Physics, Vilnius University, Saulėtekio Ave. 10, LT-10223 Vilnius, Lithuania.
In this work, a burst mode laser is used for micromachining of 20 µm-250 µm thick Invar (Fe64/Ni36) foils. Holes were drilled by firing multiple pulses transversely onto the sample without moving the beam (percussion drilling). The utilized laser system generates a burst of a controllable number of pulses (at 1030 nm) with tunable pulse-to-pulse time spacing ranging from 200 ps to 16 ns.
View Article and Find Full Text PDFMaterials (Basel)
July 2020
HiLASE Centre, Institute of Physics, Czech Academy of Sciences, Za Radnici 828, 25241 Dolni Brezany, Czech Republic.
Materials (Basel)
February 2017
Department of Nano-Mechatronics, UST, Korea University of Science and Technology, 217 Gajeong-Ro, Yuseong-Gu, Daejeon 34113, Korea.
This study investigates the effect of focal plane variation using vibration in a femtosecond laser hole drilling process on Invar alloy fabrication quality for the production of fine metal masks (FMMs). FMMs are used in the red, green, blue (RGB) evaporation process in Active Matrix Organic Light-Emitting Diode (AMOLED) manufacturing. The taper angle of the hole is adjusted by attaching the objective lens to a micro-vibrator and continuously changing the focal plane position.
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