Breath sensing is an effective tool for health monitoring. Previously, high-mesa waveguide structures have been proposed by our group for realizing a compact breath-sensing photonic circuit. By using the doped as the waveguide core, 50% concentration has been detected. One issue of preventing parts per million (ppm)-order detection is the low portion of evanescent light (=2.2) in the doped waveguides. In order to realize low propagation loss and high simultaneously, thin silicon (Si) waveguides with a as high as 37.6% have been proposed and fabricated in this work. A thermal oxidation technique was applied to further reduce , so that was decreased from 1.45 to 0.84 and 0.29 to 0.2 dB/cm for the 0.5 and 3-µm-wide waveguide, respectively. According to our analysis, the significantly decreased is attributed to recovering the damaged Si core and smoothing the waveguide sidewalls. The high and effective loss reduction show a promising potential of applying Si high-mesa waveguides to realize ppm-order sensing.

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http://dx.doi.org/10.1364/AO.391604DOI Listing

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