Ultrasonically Powered Compact Implantable Dust for Optogenetics.

This paper presents an ultrasonically powered microsystem for deep tissue optogenetic stimulation. All the phases in developing the prototype starting from modelling the piezoelectric crystal used for energy harvesting, design, simulation and measurement of the chip, and finally testing the whole system in a mimicking setup are explained. The developed system is composed of a piezoelectric harvesting cube, a rectifier chip, and a micro-scale custom-designed light-emitting-diode (LED), and envisioned to be used for freely moving animal studies. The proposed rectifier chip with a silicon area of [Formula: see text] is implemented in standard TSMC [Formula: see text] CMOS technology, for interfacing the piezoelectric cube and the microLED. Experimental results show that the proposed microsystem produces an available electrical power of  [Formula: see text] while loaded by a microLED, out of an acoustic intensity of [Formula: see text] using a [Formula: see text] crystal as the receiver. The whole system including the tested rectifier chip, a piezoelectric cube with the dimensions of [Formula: see text], and a μLED of [Formula: see text] have been integrated on a [Formula: see text] glass substrate, encapsulated inside a bio-compatible PDMS layer and tested successfully for final prototyping. The total volume of the fully-packaged device is estimated around [Formula: see text].