This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.
Download full-text PDF |
Source |
|---|---|
| http://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281444 | PMC |
| http://dx.doi.org/10.3390/mi11050484 | DOI Listing |
Publication Analysis
Top Keywords
Similar Publications
Investigating nonlinear dynamic properties of an inertial sensor with rotational velocity-dependent rigidity.
Sci Rep
January 2025
Department of Mechanical Engineering, Faculty of Engineering, Urmia University, Urmia, Iran.
This study investigates the nonlinear dynamics of a system with frequency-dependent stiffness using a MEMS-based capacitive inertial sensor as a case study. The sensor is positioned directly on a rotating component of a machine and consists of a microbeam clamped at both ends by fixed supports with a fixed central proof mass. The nonlinear behavior is determined by electrostatic forces, axial and bending motion coupling, and frequency-dependent stiffness.
View Article and Find Full Text PDFAn Investigation into High-Accuracy and Energy-Efficient Novel Capacitive MEMS for Tire Pressure Sensor Application.
Sensors (Basel)
December 2024
School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
Tire pressure monitoring systems (TPMSs) are essential for maintaining driving safety by continuously monitoring critical tire parameters, such as pressure and temperature, in real time during vehicle operation. Among these parameters, tire pressure is the most significant, necessitating the use of highly precise, cost-effective, and energy-efficient sensing technologies. With the rapid advancements in micro-electro-mechanical system (MEMS) technology, modern automotive sensing and monitoring systems increasingly rely on MEMS sensors due to their compact size, low cost, and low power consumption.
View Article and Find Full Text PDFDesign and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope.
Micromachines (Basel)
December 2024
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.
A MEMS gyroscope is a critical sensor in attitude control platforms and inertial navigation systems, which has the advantages of small size, light weight, low energy consumption, high reliability and strong anti-interference capability. This paper presents the design, simulation and fabrication of a Y-axis gyroscope with out-of-plane detection developed using CMOS-MEMS technology. The structural dimensions of the gyroscope were optimized through a multi-objective genetic algorithm, and modal, harmonic response and range simulation analyses were carried out to verify the reasonableness of the design.
View Article and Find Full Text PDFFabrication of an Integrated, Flexible, Wireless Pressure Sensor Array for the Monitoring of Ventricular Pressure.
Micromachines (Basel)
November 2024
Instituto Nacional de Astrofísica, Óptica y Electrónica-INAOE, Puebla 72840, Mexico.
This work presents the design, fabrication, and rigorous validation of a flexible, wireless, capacitive pressure sensor for the full-range continuous monitoring of ventricular pressure. The proposed system consists of an implantable set and an external readout device; both modules were designed to form an RCL resonant circuit for passive, wireless pressure sensing and signal retrieving. Using surface micromachining and flexible electronics techniques, a two-variable capacitor array and a dual-layer planar coil were integrated into a flexible ergonomic substrate, avoiding hybrid-like connections in the implantable set.
View Article and Find Full Text PDFInterface Engineering of Thin-Film Lithium Phosphorus Oxynitride Electrolyte by Appropriate Oxygen Plasma Treatment for Flexible All-Solid-State Supercapacitor.
Small Methods
December 2024
Key Laboratory of MEMS of the Ministry of Education, School of Integrated Circuits, Southeast University, Nanjing, 210096, China.
The interfacial incompatibility between lithium phosphorus oxynitride (LiPON) and anode greatly deteriorates the performance of thin-film all-solid-state supercapacitors (ASSSCs). This article investigates oxygen plasma treatment to improve the interface. Through appropriate plasma treatment, a LiO/LiPO composite layer is formed by replacing nitrogen with oxygen at the LiPON surface owing to strong reactivity of oxygen plasma.
View Article and Find Full Text PDFWant AI Summaries of new PubMed Abstracts delivered to your In-box?
Enter search terms and have AI summaries delivered each week - change queries or unsubscribe any time!