We design and theoretically investigate a surface-enhanced Raman scattering (SERS) sensor based on the hybrid plasmonic grating slot waveguide. The sensor is formed by combining a dielectric deep slot waveguide and a metallic grating slot waveguide. The proposed sensor exhibits a high field enhancement with a maximum enhancement factor of 7580.9 at the wavelength of 785 nm, revealing that the electric field in such hybrid plasmonic grating slot waveguide can be extremely strengthened. To better characterize the performance of the sensor in the SERS application, the total normalized volumetric enhancement factor (TNVEF) is proposed, which is determined by both the ||-approximation-based volumetric field enhancement and Raman scattered light collection efficiency. The TNVEF is utilized to characterize the influences of the structural parameters on the sensor and further optimize the sensing structure. Such on-chip SERS sensor can be integrated with a micro-laser and a micro-multiplexer on a photonic platform to realize an all-integrated on-chip SERS detection system.
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