Spectral analysis using chemometrics is extensively used for quantitative chemical analysis in a mixture, but it works powerfully only when the peak intensity is solely proportional to the quantity of chemical components. In this sense, thin films on a solid substrate are not suitable for chemometric analysis, because the molecular orientation also influences the peak intensity via the surface selection rules. In the present study, this long-term analytical issue has readily been overcome by using p-polarized multiple-angle incidence resolution spectrometry (pMAIRS), which has a characteristic that the in-plane (IP) and out-of-plane (OP) vibrational spectra of a thin-film sample are obtained simultaneously in a common ordinate scale. Thanks to this unique power of pMAIRS, the average of the IP and OP spectra annihilates optical anisotropy, yielding an orientation-free spectrum, which enables us to perform the simultaneous quantitative analysis of both quantity change and molecular orientation of the constituents in a thin film. Now, we are ready to examine chemical reactions quantitatively in a thin film.
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