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Self-Compliance and High Performance Pt/HfO/Ti RRAM Achieved through Annealing. | LitMetric

Self-Compliance and High Performance Pt/HfO/Ti RRAM Achieved through Annealing.

Nanomaterials (Basel)

Key Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi'an 710071, China.

Published: March 2020

A self-compliance resistive random access memory (RRAM) achieved through thermal annealing of a Pt/HfO/Ti structure. The electrical characteristic measurements show that the forming voltage of the device annealing at 500 °C decreased, and the switching ratio and uniformity improved. Tests on the device's cycling endurance and data retention characteristics found that the device had over 1000 erase/write endurance and over 10 s of lifetime (85 °C). The switching mechanisms of the devices before and after annealing were also discussed.

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Source
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC7153612PMC
http://dx.doi.org/10.3390/nano10030457DOI Listing

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