In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)Cl. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)Cl. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.
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http://dx.doi.org/10.1039/c9cp06633k | DOI Listing |
Beilstein J Nanotechnol
August 2024
Laboratory of Mechanics for Materials and Nanostructures, Empa - Swiss Federal Laboratories for Material Science and Technology, Feuerwerkerstrasse 39, CH 3602 Thun, Switzerland.
Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous precursor to form a deposit, similar to 3D printing but without the need for a resist or development step. Here, we employ for the first time a silver β-diketonate precursor for focused electron beam-induced deposition (FEBID).
View Article and Find Full Text PDFDalton Trans
August 2024
Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland.
We report the synthesis and characterization of new palladium(II) β-ketoesterate complexes [Pd(CHCOCHCOR)] with alkyl substituents R = Bu, Pr, Et. These compounds can have potential use in focused electron beam induced deposition (FEBID), which is a direct write method for the growth of structures at the nanoscale. However, it is still a major challenge to obtain deposits with a high metal content, and new precursor molecules are needed to overcome this.
View Article and Find Full Text PDFBeilstein J Nanotechnol
July 2024
Delft University of Technology, Fac. Applied Sciences, Dept. Imaging Physics, Lorentzweg 1, 2628CJ Delft, Netherlands.
Direct fabrication of pure metallic nanostructures is one of the main aims of focused electron beam-induced deposition (FEBID). It was recently achieved for gold deposits by the co-injection of a water precursor and the gold precursor Au(tfac)Me. In this work results are reported, using the same approach, on a different gold precursor, Au(acac)Me, as well as the frequently used platinum precursor MeCpPtMe.
View Article and Find Full Text PDFBeilstein J Nanotechnol
July 2024
J. Heyrovský Institute of Physical Chemistry, Czech Academy of Sciences, Dolejškova 3, 182 23 Prague, Czech Republic.
We probe the separation of ligands from iron tetracarbonyl methyl acrylate (Fe(CO)(CHO) or Fe(CO)MA) induced by the interaction with free electrons. The motivation comes from the possible use of this molecule as a nanofabrication precursor and from the corresponding need to understand its elementary reactions fundamental to the electron-induced deposition. We utilize two complementary electron collision setups and support the interpretation of data by quantum chemical calculations.
View Article and Find Full Text PDFBeilstein J Nanotechnol
May 2024
Institute for Applied and Physical Chemistry (IAPC), Faculty 2 (Chemistry/Biology), University of Bremen, Leobener Str. 5, 28359 Bremen, Germany.
The electron-induced decomposition of Fe(CO)MA (MA = methyl acrylate), which is a potential new precursor for focused electron beam-induced deposition (FEBID), was investigated by surface science experiments under UHV conditions. Auger electron spectroscopy was used to monitor deposit formation. The comparison between Fe(CO)MA and Fe(CO) revealed the effect of the modified ligand architecture on the deposit formation in electron irradiation experiments that mimic FEBID and cryo-FEBID processes.
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